Substrate and Fabrication Tool

Substrate: Typically silicon (Si), silicon carbide (SiC), gallium arsenide (GaAs), or printed circuit board (PCB) materials like FR-4 or Rogers.

Fabrication Tools:

• Photolithography System – For patterning
• Etching Tools (Wet/Dry) – For material removal
• Deposition Systems (PVD, CVD, ALD) – For metal/dielectric layers
• Ion Implanter – For doping (semiconductors)
• Wafer Bonders – For 3D integration
• E-beam Lithography – High-resolution patterning
• Mask Aligner – UV lithography for PCBs or MEMS

Note: Choice depends on application (ICs, MEMS, RF, photonics, etc.).